Txoj kev tsim cov hlau silicon hmoov

Txoj kev npaj ntawm cov hmoov hlau silicon hmoov yog qhov yooj yim thiab yooj yim, thiab txoj hauv kev npaj kuj tseem yooj yim heev thiab nkag siab yooj yim. Nws yog txhawm rau tawg qee yam ntawm coarse silicon hmoov, xa mus rau hauv plasma arc nrog inert gas, thiab kub nws tam sim ntawd, kom cov coarse silicon hmoov yuav nyob rau hauv qhov kub thiab txias, nws instantly evaporates rau hauv silicon vapor. Lub silicon vapor ces nkag mus rau hauv qhov chaw txias, yog condensed, thiab ua nanometer-theem metallic silicon hmoov.
Tshuaj vapor deposition txoj kev: Silane decomposed rau hauv silicon thiab hydrogen nyob rau hauv high hydrogen dilution tej yam kev mob nyob rau hauv qhov kev txiav txim ntawm tshav kub, microwave, laser, plasma thiab lwm yam sab nraud zog, thiab yog sai condensed nyob rau hauv ib tug roj theem ib puag ncig los npaj nano silicon hmoov.
Pob milling txoj kev: Cov kev sib txhuam loj loj tsim los ntawm kev sib hloov thiab kev sib cuam tshuam ntawm cov khoom siv los zom cov ntaub ntawv silicon loj rau hauv cov hmoov nano loj. Cov hlau silicon hmoov tsim los ntawm lub pob milling txoj kev muaj cov ntsiab lus impurity siab, particle loj tis tsis tuaj yeem tswj tau zoo, thiab tom qab ua tiav yog qhov nyuaj.