Cov khoom lag luam
Nyob rau hauv cov chaw taws teeb meem, silicon hmoov tuaj yeem yog nitrided kiag li nyob rau hauv cov txheej txheem shs los tsimSilicon Nitride, thiab cov khoom muaj cov ntsiab lus nitrogen siab thiab cov ntsiab lus oxygen, tab sis nws yog theem. Hauv cov silicon fumic shs cov tshuaj tiv thaiv, ib qho nyiaj uas tsim nyog ntawm si {{0} {1}} noob yuav tsum tau ntxiv; Qhov kev tshaj tawm ntawm cov shs combusion yoj ntawm silicon nce nrog kev nce ntom ntom ntom ntom, tab sis nws yog ywj pheej sau ntom ntom, tab sis nws yog kev ywj pheej ntawm cov reactant muaj pes tsawg leeg thiab coj tus qauv taub. Lub combusion yaws kub nce ntxiv nrog kev nce ntawm nitrogen siab thiab nce ntawm cov qauv ntawm cov kev sib xyaw ua ke ntawm reactants thiab sau ntom ntom ntom.
Cov khoom tsis muaj
| Teem nqi | N | Si | CA MIN | O min | Al min | C | FE MIN |
| Si3N 485-99 | 32-39 | 55-60 | 0.25 | 1.5 | 0.25 | 0.3 | 0.25 |
Cov Khoom Siv Kev Sib Koom Tes
1.Silicon NitrideCov yeeb yaj kiab tau npaj los ntawm kev siv PLASMA tshuaj Vapor Deposition (Pecvd), thiab cov teebmeem ntawm cov khoom sib txawv ntawm cov yam ntxwv ntawm cov khoom thiab cov dej tsis muaj zog ntawm Silicon Nitride cov yeeb yaj kiab tau kawm. Cov txiaj ntsig kev sim qhia tau hais tias nrog kev nce ntawm substrate kub, lub ntom ntom, ua kom muaj kev sib tw ntawm silicon Nrog rau qhov nce ntawm RF zog, ceev tus nqi, ceev, ua kom cov zaj duab xis nyob ua ke, thaum lub h cov ntsiab lus txo qis. Cov dej sib nraus kev sim ua rau pom tias txawm hais tias qhov kub me me tau txo qis rau 50 degree, cov khoom tso silicon nitride zaj duab xis tseem muaj kev ua haujlwm tsis zoo. Kev sim ua qhia tau tias tsawg-silicon nitride cov yeeb yaj kiab tuaj yeem siv tau zoo rau kev ntim khoom ntawm cov khoom siv olitting-emitting cov khoom siv (OLEDS).
Cim npe nrov: Cov Khoom Siv Qib Siab Silicon Nitride, Tuam Tshoj Siab Khoom Silicon Nitride Cov Chaw Tsim Khoom, Chaw muag khoom, Hoobkas