Cov Khoom Siv Qib Siab Silicon Hlau 2502

Cov khoom siv thiab npaj cov qauv nrog cov hlau hauv qab, aSilicon Hlau 2502Nanostructure, uas muaj ib hlau cov hmoov nplej nanostructure fabricated ntawm ib tug soi substrate; Lub thickness ntawm insulating txheej Dielectric ntawm no soi substrate yog}}} nm, thiab cov duab tuab ntawm cov yeeb yaj kiab silicon yog}}} nm. Txoj kev npaj npaj suav nrog kev ntxuav, kom qhuav, kiv cua sib txawv ntawm cov ntawv yuav tsum tau ua qauv zoo nkauj ntawm lub ntsej muag zoo nkauj ntawm lub sooth.

1.cov khoom siv thiab npaj cov qauv nrog cov hlau hauv qab, aSilicon Hlau 2502Nanostructure, uas muaj ib hlau cov hmoov nplej nanostructure fabricated ntawm ib tug soi substrate; Lub thickness ntawm insulating txheej Dielectric ntawm no soi substrate yog}}} nm, thiab cov duab tuab ntawm cov yeeb yaj kiab silicon yog}}} nm. Cov kev npaj txoj kev muaj nrog cov sasti substrate yog ntxuav, tig, tsim thiab kho kom zoo, thiab lub ntsej muag ua qauv zoo li qub Reactive ion ovching yog siv los etch zaj yeeb yaj kiab silicon nyob rau hauv cov duab zaj duab xis, thiab tom qab ntawd ntawm cov duab cua sov, thiab tom qab ntawd cov duab cua sov uas muaj cov yeeb yaj kiab silicon Hlau cov nyias hlau yog muab tso, thiab tom qab ntawd cov hlau thiab silicon hnov ​​mob hauv cov roj ntsha uas yog, yog, cov hlau cov leeg nanostructure yog tsim. Cov txheej txheem yooj yim thiab tuaj yeem tswj hwm txoj haujlwm thiab ntsuas ntawm cov nanostructure.

Cim npe nrov: Cov Khoom Siv Qib Siab Silicon Hlau 2502, Tuam Tshoj Cov Khoom Siv Siab Silicon Hlau 2502 Cov Chaw Tsim Tshuaj, Chaw muag khoom, Hoobkas